EWA - Projects - NIST AML

National Institute of Standards and Technology Advanced Measurements Laboratory Gaithersburg, Maryland

Photography © Dan Cunningham	Click here for diagrams

536,500 gsf
210,295 nsf
143,195 nsf lab/lab support
Construction Cost: $235M
Completion in 2004

Programming through Schematic Design - Lab Areas:
Cleanroom 15,446
Instrument 77,739
Metrology 50,010
Total: 143,195

Construction Documents - Lab Areas:
Cleanroom 2,694
Instrument 77,739
Metrology 50,010
Total: 130,443

Architect: HDR, Inc.

R&D Magazine's
2005 LABORATORY OF THE YEAR HIGH HONORS

In response to the need for more sophisticated measurements and standards by U.S. industry and the scientific community, in 1993 NIST began the process of planning new laboratory facilities. A campus-wide Master Plan was completed solidifying the need for advanced laboratories to conduct research in nanotechnology, semiconductors, biotechnology, advanced materials, quantum computing and advanced manufacturing. The new AML at NIST is the most advanced facility of its kind, providing research and development capabilities not available anywhere else in the world. The AML is the most environmentally stable laboratory ever built with concurrent stability controls for temperature, vibration, humidity, particulate matter and electromagnetic interference.

The AML consists of five interconnected units; two single-floor analytical/instrument laboratories above grade, two single-floor metrology labs below grade, and a multi-level nanofabrication building, designed as an ultra-clean room. All five units are unified by walkways above grade and a tunnel below grade that connects back to the main NIST complex.

The two Instrument Labs house a total of 187 lab modules. Typical temperature standard for most labs is 20 degree Celsius controlled to +0.25 degree, but several labs are designed to accommodate a temperature control of +0.1 degree Celsius. Most labs in this area require a minimum particulate cleanliness of Class 10,000.

The two Metrology Labs, located 40 feet below grade, house a total of 151 lab modules. The Metrology blocks house two lab types: "quiet" metrology labs which primarily consist of measurement labs; and "rotating" or "dynamic" metrology labs where moving equipment is used. Selected sections of the laboratories will be isolated on concrete slabs to further control vibration and temperatures. While most laboratories at the AML are controlled to within ± 0.25 degree Celsius, specialty areas in the Metrology labs include precision temperature control to +0.10 or 0.01 degree Celsius. Low vibration requirements range from a baseline velocity amplitude of 3 micrometers per second, down to 0.5 micrometers per second or less.

The Nanofabrication Facility includes Class 100 clean room areas, which are designed for a potential upgrade to Class 10. A full sub-fab area is located below the clean room floor. An interstitial floor for mechanical distribution separates the clean floor from the mechanical penthouse. The AML will also contain labs with improved electrical power quality to prevent any fluctuations in voltage that could affect measurements.